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질량유량계

질량유량계

RED-Y Smart

  • 제조사 : Vogtlin Instruments AG
  • 제조국 : Switzerland
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 Technical Data ‹red-y smart series›

 Instrument types

 

 

 smart meter GSM

 Thermal mass flow meter

 smart controller GSC

 Thermal mass flow controller

 OEM version

 For customer-specific requirements

 Instrument versions

 ‹Standard› 

 The economic solution

 Accuracy:                ± 1.0 % of full scale(1) 

 Turndown ratio:     1 : 50

 ‹Hi-Performance› 

 With highest accuracy and turndown ratio 

 (available for GSM < 200 ln/min / GSC < 150 ln/min (air))

 Accuracy:                ± 0.3 % of full scale + ± 0.5% of reading(1) 

 Turndown ratio:     1 : 100

 1) An additional error of ±0.25% may apply for analogue signals

 Measuring ranges

 (Air/Full scale freely selectable)

 Type

 Measuring range (air)  Connection

 red-y smart meter GSM 

 Meter



 GSM-A

 GSM-B

 GSM-C

 GSM-D 

 from 0 ... 25 mln/min                                to 0 ... 600 mln/min

 from 0 ... 600 mln/min                              to 0 ... 6000 mln/min

 from 0 ... 6 ln/min                                     to 0 ... 60 ln/min

 from 0 ... 60 ln/min                                   to 0 ... 450 ln/min

 G¼"

 G¼"

 G¼"

 G½"

 red-y smart controller GSC 

 Controller



 GSC-A

 GSC-B

 GSC-C

 GSC-D

 from 0 ... 25 mln/min                                to 0 ... 600 mln/min

 from 0 ... 600 mln/min                              to 0 ... 6000 mln/min

 from 0 ... 6 ln/min                                     to 0 ... 60 ln/min

 from 0 ... 60 ln/min                                   to 0 ... 450 ln/min

 G¼"

 G¼"

 G¼"

 G½"

 Performance data

 Media (real gas calibration)


 Air, O2(2), N2(2), He, Ar, CO2, H2, CH4, C3H8 (other gases and gas mixtures on request) 

 2)O2 & N2 are calibrated with air

 Response time



 Meter (GSM): ± 80ms(3); Controller (GSC): ± 500ms(3) 

 3)depending on device configuration & according to SEMI standard E17-1011, 5-100% of 

 range under optimized conditions

 Repeatability

 ± 0.2% of full scale (according to SEMI standard E56-0309)

 Longterm stability

 < 1% of measured value / year

 Power supply

 24 Vdc (18 – 30 Vdc), 15 Vdc on request

 Current consumption Standard

 Meter (GSM): max. 100mA; Controller (GSC): max. 250mA (GSC with valve type 8 max. 490mA)

 Current consumption Profinet RT / EtherCAT

 Meter (GSM): max. 125mA; Controller (GSC): max. 340mA (GSC with valve type 8 max. 560mA)

 Operation pressure

 0.2 – 11 bar a (GSC with valve type 4.5 and 8 max. 8 bar a)

 Temperature (environment/gas)

 0 – 50°C

 Materials

 Anodized aluminium, optional stainless steel electropolished

 Seals

 FKM, EPDM, optional FFKM

 Pressure sensitivity

 < 0.2% / bar of reading (typical N2)

 Temperature sensitivity

 < 0.025% FS measuring range type / °C

 Warm-up time

 < 1 sec. for full accuracy

 Integration

 In- / Output signals analog

 0..20 mA, 4..20 mA, 0..5 V, 1..5 V, 0..10 V, 2..10 V

 In- / Output signals digital


 RS-485; Modbus RTU (Slave); Lab View-VIs available

 Option: ProfiBus DP-V0, DP-V1 / Profinet RT / EtherCAT

 Process connection

 G¼" (BSPP(4) female) up to 60 ln/min, G½" (BSPP(4) female) up to 450 ln/min 

 4)British Standard Pipe Paralle

 Inlet section

 None required

 Electrical connection


 Sub D plug, 9 pole

 Option ProfiBus: Sub D 9 pole / Option Profinet RT or EtherCAT: 2x RJ45 (IN/OUT)

 Mounting orientation

 Any position (consult manufacturer above 5 bar or vertical mounting)

 Safety

 Test pressure

 16 bar a

 Leak rate

 < 1 x 10-6 mbar l/s He

 Ingress protection class

 IP-50

 EMC

 EN 61326-1




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FAX 031)243-1025
sales@gms-korea.com